• Erect Field: Small Flat Detection Surface
• Grazing Incidence: Soft X-Ray / EUV / FUV
• VLS: High Spectral Resolution
• Fixed Optics: Robust Stability
• Astigmatic: High Throughput, Compact
• Monochromator Conversion (optional)
ES-SXR Specifications
Mounting
Hettrick, VLS plane grating
Angle-of-Incidence (α)
87.25° (gratings A/B/C/D)
88.75° (SA/SB/SC/SD)
88.00° (focusing mirror)
Replica Grating Format
Gold surface, 62 x 15 mm
Mirror Format
Gold surface, 50 or 100 mm
Vacuum Chamber
9″ X 6″ X 5.5″, plus legs
[Weld-free electroless nickel plated 6061 aluminum]
Vacuum Compatibility
10-8 torr
User ports
TEFLAT/BLACKFLAT gasket-sealed knife-edge flanges – ICF63 (3), ICF114 (1)
Weight
12kg
Source – focal plane
1.75 meters
Meridional Aperture
3.8 mrad (gratings A/B/C/D)
1.75 mrad (SA/SB/SC/SD)
Sagittal Aperture
15 mrad (astigmatic)